Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon PDF
By:Krishna Seshan
Published on 2002-02-01 by CRC Press
The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
This Book was ranked at 33 by Google Books for keyword Depositions.
Book ID of Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon's Books is 6C0puQEACAAJ, Book which was written byKrishna Seshanhave ETAG "coQMUtOFWr0"
Book which was published by CRC Press since 2002-02-01 have ISBNs, ISBN 13 Code is 9780815514428 and ISBN 10 Code is 0815514425
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