Handbook of Thin Film Deposition Processes and Techniques PDF
By:Krishna Seshan
Published on 2001-02-01 by William Andrew
New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
This Book was ranked at 6 by Google Books for keyword Depositions.
Book ID of Handbook of Thin Film Deposition Processes and Techniques's Books is 1XAIZWz6wm4C, Book which was written byKrishna Seshanhave ETAG "3Uuo6dyY1vk"
Book which was published by William Andrew since 2001-02-01 have ISBNs, ISBN 13 Code is 9780815517788 and ISBN 10 Code is 0815517785
Reading Mode in Text Status is false and Reading Mode in Image Status is true
Book which have "430 Pages" is Printed at BOOK under CategoryTechnology and Engineering
Book was written in en
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Download Handbook of Thin Film Deposition Processes and Techniques PDF Free
Download Handbook of Thin Film Deposition Processes and Techniques Books Free
Download Handbook of Thin Film Deposition Processes and Techniques Free
Download Handbook of Thin Film Deposition Processes and Techniques PDF
Download Handbook of Thin Film Deposition Processes and Techniques Books
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